Tubular semifinished product for producing an optical fiber

ABSTRACT

Methods for producing an optical fiber by elongating a silica glass blank or a coaxial group of silica glass components, on the basis of which a fiber is obtained that comprises a core zone, an inner jacket zone enclosing the core zone and a ring zone surrounding the inner jacket zone, are known. In order to provide, proceeding from this, a method, a tubular semi-finished product and a group of coaxial components for the cost-effective production of an optical fiber, which is characterized by a high quality of the boundary between the core and jacket and by low bending sensitivity, according to the invention, the silica glass of the ring zone is provided in the form of a ring zone tube made of silica glass having a mean fluorine content of at least 6000 weight ppm and the tube has an inner tube surface and an outer tube surface, wherein via the wall of the ring zone tube, a radial fluorine concentration profile is adjusted which has an inner fluorine depletion layer with a layer thickness of at least 1 μm and no more than 10 μm, in which the fluorine content decreases toward the inner tube surface and is no more than 3000 weight ppm in a region close to the surface which has a thickness of 1 μm.

RELATED APPLICATIONS

This application is a divisional application of U.S. patent applicationSer. No. 13/583,605 having U.S. filing date Sep. 10, 2012, published asU.S. 2012/0324960 on Dec. 27, 2012 herein incorporated by reference, andwhich was a U.S. national stage of international application serialnumber PCT/EP2011/053590 filed on Mar. 10, 2011 and published on Apr.10, 2008 as WO 2008/040615 A1, which is herein incorporated byreference.

The present invention refers to a method for producing an optical fiberby elongating a quartz glass preform or a coaxial assembly of quartzglass components, the fiber comprising a core zone with a refractiveindex n_(K), an inner cladding zone overcladding the core zone andhaving a refractive index n_(Mi), a ring zone surrounding the innercladding zone and consisting of doped quartz glass having a refractiveindex n_(F), as well as an outer cladding zone surrounding the ringzone, where: n_(F)<n_(Mi)<n_(K).

Furthermore, the present invention refers to a tubular semifinishedproduct for producing an optical fiber.

PRIOR ART

The attenuation of the light signal guided in an optical fiber dependsinter alia on bends of the fiber. Small bending radii effect anincreased optical attenuation. The signal loss can be reduced by usingbending-insensitive optical fibers. Such fibers have been known for manyyears and more and more attention is paid to them in the laying of fiberoptic networks up to the home (fiber-to-the-home; FTTH). With thisapplication, particularly small bending radii are often desired onaccount of spatial restrictions or esthetic demands.

Such a bending-insensitive optical fiber is described in WO 2010/003856A1, which also discloses a manufacturing method for the fiber accordingto the above-mentioned type. The bending-insensitive optical fibercomprises a core zone with a refractive index n_(K), a cladding zoneovercladding the core zone and having a refractive index n_(Mi), a ringzone surrounding the cladding zone and consisting of fluorine-dopedquartz glass having a refractive index n_(F), as well as an outer layersurrounding the ring zone and consisting of undoped quartz glass with arefractive index n_(Ma), resulting in a radial refractive index profile,where: n_(Ma)>n_(F)<n_(Mi)<n_(K). The fiber is obtained by elongating aquartz glass preform or a coaxial assembly of quartz glass components,wherein the quartz glass of the ring zone is produced in a plasmaoutside deposition process in that on a tubular or rod-shaped substratebody a ring zone layer is produced from the fluorine-doped quartz glasshaving a layer thickness of at least 1 mm and a refractive indexn_(F)≦1.4519.

To achieve an efficient production method and to minimize the risk ofwaste, it is advantageous when the individual components of the fiberare produced in separate method steps and are only joined in a finalstep.

Such a method is described in EP 1 712 934 A1, which also discloses asemifinished product according to the aforementioned type. For themanufacture of a large-volume preform a semifinished product is providedthat is exclusively composed of a number of tube- or rod-shapedindividual elements. The individual elements constitute a core rod whichhas been formed by joining end-to-end stacked segments and which isarranged inside an inner overclad tube. The inner overclad tube issurrounded by an outer overclad tube. The components are arranged to becoaxial with one another and are directly drawn into the optical fiberin an elongating process.

Hydroxyl groups and metallic impurities, such as chlorine, aluminum oriron, may negatively affect the optical transmission of the fiber to bedrawn. To minimize their impact, the inner overclad tube shows anexpensive quartz-glass quality of high purity. On the other hand, inorder to keep the costs of the semifinished product altogether low, itis suggested that the outer overclad tube should have a higherconcentration of impurities.

It is true that the separate production of the individual elements andtheir final joining in the fiber drawing process are conducive to thelow-cost production of optical fibers and reduce the risk of waste.However, this automatically results in additional surfaces andinterfaces between the individual elements to be joined, which augmentsinterfacial problems and increases the demands made on the quality ofthe interfaces. Special attention is here paid to the formation ofbubbles in the interfacial area.

DE 10 2008 047 736 B3 describes the use of a fluorine-doped quartz glasstube for overcladding a core rod.

U.S. Pat. No. 6,263,706 B1 discloses a method for setting afluorine-concentration profile in a SiO₂ soot tube. The soot tube ispreferably fluorine-doped through the gas phase after removal of amandrel in that a fluorine-containing doping gas is passed along theouter wall of the soot tube and either no gas or helium is passedthrough the inner bore. The refractive index profiles produced aresubstantially parabolic with a maximum in the tube center.

DE 600 04 778 T2 describes the manufacture of fluorine-doped quartzglass bodies through a sol-gel-route. Fluorine doping is carried out byadding a fluorine-containing start substance to the sol, preferablytetramethylammonium fluoride. After sintering the cylindrical quartzglass samples show refractive index curves in the case of which therefractive index is decreasing from the outside to the inside (and thefluorine concentration is thus increasing from the outside to theinside). The highest fluorine concentration is obtained in the center.The decrease of the fluorine concentration at the edge is ascribed tofluorine loss caused by heating.

U.S. Pat. No. 3,981,707 A describes the manufacture of an optical fiberby collapsing a fluorine-doped quartz glass tube which has aninhomogeneous radial fluorine concentration profile in the case of whichthe fluorine concentration has a maximum in the tube center and isdecreasing towards the inner tube wall and towards the outer tube wall.The fluorine depletion in the area of the free tube surfaces is producedin that the tube consisting of fluorine-doped quartz glass is treated ata high temperature.

DE 101 55 134 C1 discloses a method for producing a preform in that acore rod is provided at a predetermined cladding/core ratio with a sootlayer by means of a POD (plasma outside deposition) process in ahydrogen-free atmosphere, and the soot layer is subsequently dried andvitrified. A hydroxyl group content of less than 30 wt. ppb and adefect-free contact area to the core rod are obtained in the claddingglass.

TECHNICAL OBJECT

It is the object of the present invention to provide a method and atubular semifinished product for the low-cost production of an opticalfiber that is distinguished by a high quality of the interface betweencore and cladding and by low bending sensitivity.

GENERAL DESCRIPTION OF THE INVENTION

As for the production method, this object starting from theabove-mentioned method is achieved according to the invention in thatthe quartz glass of the ring zone is provided in the form of a ring zonetube consisting of quartz glass with a mean fluorine content of at least6000 wt. ppm, which has a wall defined by an inner tube surface and anouter tube surface, a radial fluorine concentration profile being setover the ring zone tube wall, said profile having an inner fluorinedepletion layer with a layer thickness of at least 1 μm and not morethan 10 μm, in which the fluorine content decreases towards the innertube surface and is not more than 3000 wt. ppm in a near-surface regionwith a thickness of 1 μm.

According to the invention the quartz glass for the ring zone isprovided in the form of at least one fluorine-doped quartz glass tube,which is here called “ring zone tube”.

A fluorine-doped quartz glass tube is produced either with the help of aso-called POD (plasma outside deposition) process in that SiO₂ particlesare directly vitrified into a quartz glass tube by direct fluorinedoping, or with the help of a CVD method by hydrolysis or pyrolysis ofsilicon-containing start compounds with buildup of a SiO₂ soot bodywhich is subsequently doped with fluorine and sintered.

The other individual elements, namely an outer cladding tube of doped orundoped quartz glass for producing the outer cladding zone of the fiberand the core rod for producing the core zone and the inner cladding zoneof the fiber, can also be produced in separate processes and cansubsequently be arranged in the form of an assembly of coaxialcomponents for producing the fiber. The coaxial assembly is subsequentlycollapsed into a preform or is elongated or is directly elongated into afiber. If a preform is first produced, said preform is drawn in aseparate method step into the optical fiber. In this process or beforethat process it may be provided with additional cladding material, e.g.by adding further quartz glass in tubular form or by outside depositionmethods.

In a monomode fiber, the ring zone of fluorine-doped quartz glass with alower refractive index than the cladding glass effects an additionalconduction of the light mode. In order to prevent an excessive change inthe mode field diameter as compared with a standard monomode fiber, thering zone has a slight distance from the core, i.e., it is separatedfrom said core by an inner cladding glass zone. Thus the ring zoneeffects a reduction of the losses during fiber bending in comparisonwith a standard fiber without ring zone, without impairing thecompatibility with standard monomode fibers. This is important whenbending-insensitive fibers with ring zone are connected to standardfibers.

It is important that, when a contact area is formed towards the corezone, the fluorine-doped ring zone tube is provided over its wall with aradial fluorine concentration profile decreasing towards the inner tubesurface. It has been found that this substantially reduces the formationof bubbles on the interface with the core rod in the elongation process.The area of reduced fluorine concentration in the edge portion of thering zone tube is hereinafter also called “fluorine depletion layer”.

Doping with fluorine effects a reduction of the refractive index of thequartz glass of the ring zone. With respect to a high bendinginsensitivity of the optical fibers a high fluorine concentration and asteeper refractive-index jump between core rod and ring zone areadvantageous. The fluorine content is therefore set to at least 6000 wt.ppm and it can amount to up to 15,000 wt. ppm. The refractive indexdecrease accomplished by fluorine doping as compared to undoped quartzglass is at least 2×10⁻⁴ in comparison with the refractive index ofundoped quartz glass.

On the other hand, however, the problem regarding bubbles on theinterfaces is increasing within an increasing mean fluorine content ofthe ring zone tube. Hence, the bubble-reducing effect of the fluorinedepletion layer is particularly noticeable in the case of high averagefluorine contents. The method according to the invention is thuspreferably noticeable in ring zone tubes having high average fluorinecontents of 6000 wt. ppm or more. The fluorine concentration thatfollows from a spectroscopic measurement across the tube wall isunderstood as the average fluorine content of the ring zone tube. Thefluorine depletion layer is here not significantly noticeable because ofits comparatively small thickness.

Doping with fluorine effects a reduction of the refractive index of thequartz glass of the ring zone. As has been mentioned above, a steeperrefractive-index jump between core rod and ring zone is advantageous fora high bending insensitivity of the optical fiber. Fluorineconcentration gradients and thus radial refractive gradients are in thisrespect undesired per se. Surprisingly, however, it has been found thatlayer thicknesses of less than 10 μm are acceptable and represent asuitable compromise between bending insensitivity of the fiber andquality of the interface. At a layer thickness of less than 1 μm,however, there is no significant effect as regards a reduced bubbleformation.

The smaller the fluorine content in the fluorine depletion layer, thesmaller is the problem regarding the formation of bubbles on the contactareas to the ring zone tube. In this respect the fluorine depletionlayer in a near-surface region with a thickness of 1 μm has a fluorinecontent of 3000 wt. ppm or less. The particularly low fluorine contentin the near-surface region substantially contributes to a low bubbleformation.

The fluorine depletion layer is defined as that layer thickness that hasa fluorine concentration which has less than 80% of the maximumconcentration of fluorine in the quartz glass of the ring zone tube.Likewise, the fluorine-depleted near-surface region is defined as thatlayer thickness that has a fluorine concentration that is less than 80%of the maximum concentration of fluorine in the quartz glass of the ringzone tube.

What is decisive is the decline of the fluorine concentration profiletowards the core rod. However, it has been found to be advantageous whenthe ring zone tube is provided with a radial fluorine concentrationprofile over the ring zone tube wall that also comprises an outerfluorine depletion layer in which the fluorine concentration decreasestowards the outer tube surface.

This results in reduced bubble formation also on the interface betweenring zone and outer cladding zone. Less strict demands are made on thedimension of the outer fluorine depletion layer, on the steepness of thedecrease in the fluorine concentration and on the maximum concentrationin the near-surface region than in the case of the inner fluorinedepletion layer. The dimensions, profiles and concentrations which havealready been explained further above for the inner fluorine depletionlayer are at any rate adequate for the outer fluorine depletion layer.

It has turned out to be advantageous when the fluorine depletion layerhas a layer thickness of less than 4 μm.

Layer thicknesses of less than 4 μm constitute a particularly suitablecompromise between bending insensitivity of the fibers and quality oftheir inner interfaces to the ring zone tube.

The ring zone tube is preferably produced without tools by drawing abase tube from a fluorine-doped quartz glass while forming fluorinedepletion zones on the inner tube surface and on the outer tube surface.

The heating of the base tube and the accompanying out-diffusion offluorine from the near-surface layers normally lead however to afluorine depletion on the inner surface and on the outer surface,resulting in a flat concentration gradient. The fluorine out-diffusioncan be set by selecting the temperature and the heating duration duringelongation of the base tube such that a fluorine-depleted layer isobtained with the above-mentioned dimensions and concentration profiles.Suitable parameter pairs of temperature/heating duration can bedetermined by the skilled person in a few tests.

Further indications are the outer diameter of the drawn ring zone tube,which is preferably in the range of 10-50% of the outer diameter of thebase tube; typically, one obtains outer diameters in the range of 30-70mm, and the cylinder ratio of outer diameter to inner diameter is in thering zone tube 0.2 to 0.8 smaller than in the base tube.

As an alternative, the ring zone tube is heated after its production ina separate method step for producing the fluorine depletion layer withthe desired thickness and the predetermined fluorine concentrationprofile. Also when the ring zone tube is heated, the fluorineout-diffusion can be set by selecting the temperature and the heatingduration in a few tests.

Heating the base tube in the drawing process or heating the ring zonetube is carried out preferably by means of an electric heater in ahydrogen-free atmosphere.

This reduces the input of hydroxyl groups into near-surface regions ofthe ring zone tube.

Without any special precautions, a fluorine-depleted surface layer witha thickness exceeding the target size may be obtained after the drawingof the base tube. This result can also be achieved during heating of thering zone tube for the purpose of setting a sufficiently thick fluorinedepletion layer—also on purpose. The excessive fluorine-depleted layerthickness can be removed by etching with hydrofluoric acid or a gaseousetchant. In this connection it has therefore turned out to be useful topartly remove at least the inner tube surface of the ring zone tubeafter drawing of the base tube or during drawing.

Owing to the removal of the inner surface the thickness of the fluorinedepletion layer is reduced to the predetermined desired value and aclean surface that is as defect-free as possible is produced at the sametime. The removing process is preferably carried out by way of gas-phaseetching to avoid a loading of the quartz glass with water and hydroxylgroups.

The thickness of the fluorine-depleted surface layer may amount to 15 μmor more after drawing of the base tube or after heating of the ring zonetube. It is important that in the subsequent removal of the innersurface the removal depth is smaller than said previously produced,fluorine-depleted surface layer, so that a part thereof is maintained asthe fluorine depletion layer with the desired target thickness. In thisrespect it has turned out to be advantageous when the removal depth ofthe inner surface is in the range of 10-70% of the original thickness ofa fluorine-depleted surface layer.

The smaller the fluorine content in the fluorine depletion layer, thesmaller is the problem regarding the formation of bubbles on the contactareas to the ring zone tube. In this respect it has turned out to beadvantageous when the fluorine depletion layer in said near-surfaceregion has a fluorine content of not more than 2000 wt. ppm. A lowfluorine content in the near-surface layer with a layer thickness of 1μm substantially reduces the formation of bubbles.

It has been found that the hydroxyl group content in combination with ahigh fluorine content can promote bubbles in the region of the contactareas to the ring zone tube. A procedure is therefore preferred in whichthe quartz glass of the ring zone tube in the area of the fluorinedepletion layer has a mean hydroxyl-group content of less than 1 wt. ppmand preferably of less than 0.5 wt. ppm.

A small hydroxyl group content in the fluorine depletion layer is e.g.achieved when the heating process during elongation of a base tube forobtaining the ring zone tube or the heating of the ring zone tube forforming the fluorine depletion layer is carried out in an electricheating zone in a hydrogen-free atmosphere.

A low hydroxyl group content is equally helpful for the other individualelements to be joined with the ring zone tube to avoid bubble formation.In this connection it has turned out to be advantageous when the quartzglass of the inner cladding zone is provided by a core rod that in thearea of a surface layer with a layer thickness of 10 μm has a hydroxylgroup content of less than 0.5 wt. ppm.

This low hydroxyl group content in the near-surface area of the core rodis e.g. achieved in that the core rod is elongated in an electricheating zone, i.e., no hydrogen-containing flame is used for flamepolishing, or the like.

It is also advantageous for the same reason when the quartz glass of theouter cladding zone is provided by an outer cladding tube that in thearea of its inner surface has a surface layer that in a layer thicknessof 10 μm has a hydroxyl group content of less than 0.5 wt. ppm.

The outer cladding tube consists of doped or undoped quartz glass and ispreferably produced by an OVD soot-buildup process and by subsequentdehydration in chlorine-containing atmosphere and by sintering,including a mechanical treatment and drawing into a cladding tube.

The low hydroxyl group content in the area of the inner surface of theouter cladding tube is also realized in that the inner surface of theouter cladding tube is produced by mechanical treatment.

Due to the mechanical treatment, a possibly increased hydroxyl groupcontent in the surface area can be removed without the introduction ofnew hydroxyl groups.

The heating of the ring zone tube for producing the fluorine depletionlayer can also be carried out during elongation of the assemblyconsisting of carbon, ring zone tube and possible further individualparts. The length of the heating zone and the feed rate of the assemblythrough the heating zone should be paid attention to. In this respect ithas turned out to be advantageous when the quotient of heating zonelength (in mm) and feed rate of the base tube (in mm/min) is 10 min ormore.

The length of the heating zone is at least 150 mm and is typically inthe range of 180 mm to 250 mm. The temperature in the range of thesurface of the ring zone tube is at least 2200° C.

As for the tubular semifinished product for producing an optical fiber,the above-mentioned object is achieved according to the invention inthat it consists of quartz glass having a mean fluorine content of atleast 6000 wt. ppm, and has a wall defined by an inner tube surface andan outer tube surface, over which a radial fluorine concentrationprofile is set that has an inner fluorine depletion layer with a layerthickness of at least 1 μm and not more than 10 μm, in which thefluorine content decreases towards the inner tube surface and is notmore than 3000 wt. ppm in a near-surface region with a thickness of 1μm.

The semifinished product in the form of a fluorine-doped quartz glasstube is here designated as a “ring zone tube”. Said tube is producedeither with the help of a so-called POD (plasma outside deposition)method in which SiO₂ particles are directly vitrified into a quartzglass tube synthetically by direct fluorine doping, or with the help ofa CVD method by hydrolysis or pyrolysis of silicon-containing startcompounds with buildup of a SiO₂ soot body that is subsequently dopedwith fluorine and is sintered.

The ring zone tube serves to produce an optical fiber by means of theabove-described method and is here processed in a coaxial assemblytogether with other individual elements, including an outer claddingtube and a core rod, into a preform or into a fiber. The inner tubesurface and the outer tube surface are softened and fused with quartzglass of other individual elements consisting of quartz glass. Due tothe fluorine content of the ring zone tube, bubbles may form on thecontact areas.

To counteract this effect, the ring zone tube according to the inventionis provided over its wall with a radial fluorine concentration profilewhich decreases at least towards the inner surface. As a result, theformation of bubbles on the interface to the core rod is substantiallyreduced during elongation of the semifinished product. The portion ofreduced fluorine concentration in the edge portion of the ring zone tubeis called “fluorine depletion layer”.

Doping with fluorine effects a reduction of the refractive index of thequartz glass of the ring zone. With respect to a high bendinginsensitivity of the optical fibers a high fluorine concentration and asteep refractive-index jump between core rod and ring zone areadvantageous. The fluorine content of the ring zone tube is therefore atleast 6000 wt. and it can amount to up to 15,000 wt. ppm. The refractiveindex reduction caused by fluorine doping as compared with undopedquartz glass is at least 2×10⁻⁴ in comparison with the refractive indexof undoped quartz glass.

On the other hand, however, the problem regarding bubbles on theinterfaces is increasing within an increasing mean fluorine content ofthe ring zone tube. Hence, the bubble-reducing effect of the fluorinedepletion layer is particularly noticeable in the case of high meanfluorine contents. The method according to the invention is thuspreferably noticeable in ring zone tubes having high mean fluorinecontents of 6000 wt. ppm or more.

Doping with fluorine effects a reduction of the refractive index of thequartz glass of the ring zone. As has been mentioned above, a steeperrefractive-index jump between core rod and ring zone is advantageous fora high bending insensitivity of the optical fiber. Fluorineconcentration gradients and thus radial refractive gradients are in thisrespect undesired per se. Layer thicknesses of less than 10 μm arehowever acceptable and represent a suitable compromise between bendinginsensitivity of the fiber and quality of the interface. At a layerthickness of less than 1 μm, however, there is no significant effect asregards reduced bubble formation.

The smaller the fluorine content in the fluorine depletion layer, thesmaller is the problem regarding the formation of bubbles on the contactsurfaces to the ring zone tube. In this respect the fluorine depletionlayer in a near-surface region with a thickness of 1 μm has a fluorinecontent of 3000 wt. ppm or less. The particularly low fluorine contentin the near-surface region substantially contributes to a low bubbleformation.

The fluorine depletion layer and the fluorine-depleted near-surfaceregion have been defined further above with reference to the methodaccording to the invention.

Advantageous developments of the semifinished product according to theinvention follow from the sub-claims. Insofar as configurations of thesemifinished product indicated in sub-claims copy the proceduresindicated in sub-claims with respect to the method according to theinvention, reference is made for supplementary explanation to the abovestatements on the corresponding method claims.

The ring zone tube serves to produce an optical fiber. To this end it isarranged together with other individual elements, including an outercladding tube of doped or undoped quartz glass and a core rod, which areeach produced in separate processes, in the form of the componentassembly. This assembly is subsequently processed into a preform ordirectly into a fiber. It is essential that the fluorine-doped ring zonetube is provided across its wall with a radial fluorine concentrationprofile that is decreasing to the inner surface. As a result, theformation of bubbles on the interface to the core rod is considerablyreduced during elongation of the semifinished product.

The ring zone tube brings about an increased bending insensitivity inthe optical fiber drawn therefrom.

The core rod is preferably composed of a plurality of core rod segmentswhich are arranged end to end in axial direction within the ring zonetube. The segmentation of the core rod permits core rod lengths of anydesired dimensions.

An annular gap with a gap width in the range of preferably 0.5 to 2 mmremains in the assembly between the core rod and the ring zone tube. Thesame is true for the ring gap between the ring zone tube and the outercladding tube.

The ratio of outer diameter to inner diameter of the ring zone tube ispreferably within the range between 1.4 and 1.8, at a preferred wallthickness between 2 and 12 mm. The length of the ring zone tube istypically between 1 and 3 m, wherein a plurality of ring zone tubesections can be welded end to end to one another.

EMBODIMENT

The invention will now be explained in more detail with reference toembodiments and a patent drawing, which drawing shows in detail in:

FIG. 1 a diagram with radial concentration profiles of SiO₂ and fluorinein the area of the outer tube surface of a ring zone tube, and

FIG. 2 a diagram with radial concentration profiles of SiO₂ and fluorinein the area of the inner tube surface of a ring zone tube.

A soot body is produced with the help of a standard soot depositionmethod and is subsequently doped with fluorine.

After vitrification of the soot body a quartz glass cylinder is obtainedwith an outer diameter of 200 mm, an inner diameter of 80 mm, resultingin a ratio of outer diameter to inner diameter of 2.5. The quartz glasshas a mean hydroxyl group content of 0.1 wt. ppm and a mean fluorinecontent of 6100 wt. ppm, which yields a refractive index decrease ascompared with undoped quartz glass.

The start cylinder is drawn without tools into a ring zone tube havingan outer diameter of 38 mm, an inner diameter of 25 mm, and a wallthickness of 6.5 mm.

The start cylinder is here fed in a hydrogen-free nitrogen atmosphere toan electric heating zone at a temperature of at least 2200° and at alength “L” of 170 mm at a feed rate “v” of 10 mm/min, resulting in avalue of 10 min for the quotient L/v.

The ring zone tube obtained thereafter is distinguished by an inner tubesurface which is smoothed by hot forming and has a particularly highsurface quality. A fluorine-depleted surface layer with a thickness ofabout 5 μm is formed by heating during the elongation process in thearea of the inner and outer tube surfaces of the ring zone tube.

The corresponding concentration profile in the area of the outer surfaceis shown in FIG. 1. The concentrations for fluorine (curve 2) and SiO₂(curve 1) are plotted on the ordinate in relative units (based on therespective maximum concentration of SiO₂ and fluorine), and the radialposition is plotted in [μm] on the abscissa. The gradual rise in therespective concentration profiles and the offset from the zero point isdue to the spatial resolution of the measuring method.

The layer thickness that has a fluorine concentration of less than 80%of the maximum value is defined as the “fluorine depletion layer”. Theassociated position is designated with “B” in FIG. 1. The concentrationof SiO₂ represents the reference point (zero point) for the positionvalue. The zero point for the position, which zero point pertains to the80% concentration value, is designated with “A” in FIG. 1. The layerthickness for the fluorine depletion layer thus follows from thedistance A-B of the concentration profiles of fluorine and SiO₂ at the80% concentration value. In the near-surface region of up to 1 μm thefluorine concentration is less than 2100 wt. ppm and the thickness ofthe fluorine-depleted surface layer is in this case about 7 μm on thewhole. It is acceptable for the outer cylinder jacket of the ring zonetube, but not optimal for the inner cylinder jacket.

Therefore, the inner surface of the ring zone tube, which afterelongation has a similar fluorine depletion layer as the outer cladding,is etched off in that a hot gas stream of etching gas (SF₆) is passedthrough the inner bore. The concentration profiles obtained thereafteron the inner wall are shown in FIG. 2. It follows from the comparison ofthe concentration profiles of SiO₂ (curve 2) and fluorine (curve) thatdue to the removal of the inner surface the thickness of the fluorinedepletion layer is adjusted to the predetermined desired value of about1.5 μm and a steeper concentration curve is simultaneously obtained inthe near-surface region. Due to the etching process a clean anddefect-free surface is produced. In this case, too, the layer thicknesswhich has a fluorine concentration which is less than 80% of the maximumconcentration of fluorine and which can be read by way of the positionaldistance A-B is defined as the fluorine depletion layer. The meanfluorine content within the fluorine depletion layer is more than 3000wt. ppm and it is about 2800 wt. ppm within an inner near-surface regionof 1 μm.

It is true that the mean chlorine content of the ring zone tube is 200wt. ppm and the nominal hydroxyl group content of the quartz glass ofthe ring zone tube is 0.1 wt. ppm. Due to the elongation process, it ishowever increased near the surface to maximum values of 5 wt. ppm ormore. Due to the subsequent gas-phase etching a layer with a relativelyhigh hydroxyl group content is however removed, so that a mean hydroxylgroup of not more than 0.4 wt. ppm is obtained on the surface of thefluorine depletion layer, measured over a layer thickness of 1 μm.

The ring zone tube obtained thereby is used for overcladding a core rodin a rod-in-tube method. To this end segments are cut to the desiredlengths from the ring zone tube. The core rod has a GeO₂ doped coreregion with a radius of 12 mm and is surrounded with an inner claddingof undoped quartz glass having a layer thickness of 5.5 mm.

The core rod is inserted into the inner bore of the ring zone tube andthe tube, in turn, is surrounded by a jacket tube of undoped quartzglass with the refractive index n_(Ma) that has an outer diameter of 175mm, an inner diameter of 40 mm, and a mean chlorine content of 1800 wt.ppm.

This coaxial arrangement of components is subsequently introduced into adrawing furnace in vertical orientation and is softened therein zone byzone, starting with the lower end, and a fiber is drawn from thesoftened region. The outer and inner “fluorine depletion layers” of thering zone tube serve as “passivation layers” that reduce theout-diffusion of fluorine and thereby prevent the formation of bubblesin the area of the interfaces. The fluorine depletion layers therebycontribute to a low-defect contact area and interface to the core rodand to the jacket tube.

A bending-insensitive optical single-mode fiber with an outer diameterof 125 μm is drawn; it is distinguished by a ring zone with a highfluorine concentration and has a distance from the outer region of thecore zone. The following is true for the radial course of the refractiveindex of the assembly: n_(Ma)>n_(F)<n_(Mi)<n_(K).

1.-8. (canceled)
 9. A tubular semifinished product for producing anoptical fiber, said product comprising a tube of quartz glass having amean fluorine content of at least 6000 wt. ppm, said tube having a wallwith an inner tube surface and an outer tube surface, a radial fluorineconcentration profile being set over said wall, wherein said wall has aninner fluorine depletion layer with a layer thickness of at least 1 μmand not more than 10 μm, the inner fluorine depletion layer having anear-surface region with a thickness of 1 μm near the inner tubesurface, and a fluorine concentration that decreases towards the innertube surface and is not more than 3000 wt. ppm in said near-surfaceregion.
 10. The tubular semifinished product according to claim 9,wherein the radial fluorine concentration profile, having an outerfluorine depletion layer in which the fluorine concentration isdecreasing towards the outer tube surface, is set over the wall of aring zone tube.
 11. The tubular semifinished product according to claim9, wherein the inner fluorine depletion layer has a layer thickness ofat least 1 μm and less than 4 μm.
 12. The tubular semifinished productaccording to claim 9, wherein the tube has an inner tube surfaceproduced without tools in a melt flow.
 13. The tubular semifinishedproduct according to claim 9, wherein the fluorine content in the nearsurface region is not more than 2000 wt. ppm.
 14. The tubularsemifinished product according to claim 9, wherein the quartz glass ofthe tube in the area of the fluorine depletion layer has a meanhydroxyl-group content of less than 1 wt. ppm.
 15. The tubularsemifinished product according to claim 9, wherein the quartz glass ofthe tube in the area of the fluorine depletion layer has a meanhydroxyl-group content of less than 0.5 wt. ppm.
 16. A preform orcoaxial assembly for producing a quartz glass fiber comprising a ringzone tube; said ring zone tube having a wall extending between an innertube surface and an outer tube surface and having a radial thickness ofat least 2 mm, and having a fluorine concentration over the radialthickness that includes a maximum fluorine concentration at one or morepoints; said wall including an inner fluorine depletion layer with alayer thickness of at least 1 μm and not more than 10 μm; the innerfluorine depletion layer having a near-surface region with a thicknessof 1 μm near the inner tube surface; the wall having a mean fluorinecontent over the radial thickness thereof of at least 6000 wt. ppm; theinner fluorine depletion layer having a fluorine content that is lessthan 80% of the maximum fluorine concentration over the layer thicknessand that decreases towards the inner tube surface; the near-surfaceregion having a fluorine content that is not more than 3000 wt. ppm. 17.The tubular semifinished product according to claim 16, wherein theinner fluorine depletion layer has a layer thickness of at least 1 μmand less than 4 μm.
 18. The tubular semifinished product according toclaim 16, wherein the tube has an inner tube surface produced withouttools in a melt flow.
 19. The tubular semifinished product according toclaim 16, wherein the fluorine content in the near-surface region is notmore than 2000 wt. ppm.
 20. The tubular semifinished product accordingto claim 16, wherein the quartz glass of the tube in the area of thefluorine depletion layer has a mean hydroxyl-group content of less than1 wt. ppm.
 21. The tubular semifinished product according to claim 16,wherein the quartz glass of the tube in the area of the fluorinedepletion layer has a mean hydroxyl-group content of less than 0.5 wt.ppm.